Fraunhofer IZMs center “All Silicon System Integration Dresden – ASSID” operates a leading edge, industry-compatible 200/300 mm 3D wafer-level process line with modules for TSV formation, pre-assembly (thinning, singulation), wafer-level assembly and stack Formation. ASSID is focusing on process development, material and equipment evaluation as well as R&D services. It is a partner in national, European and worldwide industrial and scientific projects and networks for 3D system integration, e. g., HIR, HTA, ENIAC JU, Catrene, EPOSS, SEMATECH and the Silicon Saxony Network. Fraunhofer IZM-ASSID has established cooperation and joint development programs with industrial partners for undertaking material and equipment evaluation, process development as well as process and product integration.
Technological services include:
Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration IZM - ASSID
01468 Moritzburg OT Boxdorf
Phone: +49 351 79557212
Fax: +49 351 79557219
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