MueTec offers a comprehensive range of optical inspection systems for the semiconductor and MEMS industry, including:
We are fast and flexible to tailor our solutions to your individual needs. In more than 25 years, MueTec has installed hundreds of systems around the world that provide proof of highest performance and quality stand-ards.
IRIS Product Family: 200mm/300mm Infrared inspection and metrology system for MEMS, Power Semiconductor and LED. Applications include MEMS sealing inspection (glass frit and eutectic bonding), top-to-bottom overlay, MEMS device inspection and critical dimension measurement.
MT1000 Product Family: high throughput macro defect inspection system for parallel wafer frontside and backside inspection. No recipe required.
Phone: +49 89 15001690
Fax: +49 89 150016960
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