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Logo Made in Germany SEMICON Japan 2017

UniTemp GmbH

Booth number: 1709-5

www.unitemp.de
astrid.birkner@unitemp.de

About us

UniTemp Germany was founded in 2000. Our main focus is the development of high precision and high temperature (up to 1200 °C) process equipment with very fast ramp up rates (up to 150 K/second). Our customers are located in the semiconductor industry and R&D. We also focused on customer specific solutions.



Products and services

We offer

  • RTP ovens with fast ramp up rates and controlled ramp down rates
  • HVS MEMS sealing 
  • Vacuum Process oven and systems
  • Wire Bonding machines
VPO-1000-300 Vacuum Process Oven

VPO-1000-300 Vacuum Process Oven

The UniTemp VPO-1000-300 Oven is a compact solution for processing up to 300 mm wafer size and up to 1000 °C (optionally up to 1200 °C). Excellent ramp up and ramp down rates are guaranteed by double crossed IR lamp fields and cooling by gas. A lift pin version and a remote control system is also available as well as the option for connecting a robotics system.

unitemp.de/EN/rtprta-ovens/rtp-series/-vpo-300/

RTP-100 Rapid Thermal Annealing oven

RTP-100 Rapid Thermal Annealing oven

Our RTP oven series is a single wafer process development tool for up to 1200°C. Optionally up to vacuum up to 10E-6 hPa. Up to 150 mm wafer size. The oven is SIMATIC controlled and can be easily used by a touch panel system.
This system is like a table top system.

WB-200 Wire Bonder

WB-200 Wire Bonder

The WB-200 is a perfect tool for laboratory use and small series. It allows an easy tool change from wedge to ball bonding. For wire from 17-50µ (gold or aluminium). Key feature is the 3 motorized axis (X, Y and Z). The Z-axis is mouse controlled. For the options we offer different solutions depending on the customers demand and application.

News & Innovations

WB-200 Semi-automatic wire bonder for wedge and ball bonding 

Bonds can be performed by

  • manual
  • semi automatic by mouse control and binocular
  • semi automatic by mouse control and vertical camera system

Contacts

Address
UniTemp GmbH
Luitpoldstr. 6
85276 Pfaffenhofen
Germany

Phone: +49 8441 787663

Koichi Kato
CEO Japan
Phone: +81 90 93961097
koichi.kato@unitemp.jp

Representative
UniTemp Japan Co., Ltd.
Nagara Building 4F, 1-5-8 Rinkan
242-0003 Yamato-City Kanagawa
Japan

Phone: +81 46 2047531
Fax: +81 50 37308404

koichi.kato@unitemp.jp
www.unitemp.jp



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