Logo Made in Germany SEMICON Japan 2017

UniTemp GmbH

Booth number: 1709-5

About us

UniTemp Germany was founded in 2000. Our main focus is the development of high precision and high temperature (up to 1200 °C) process equipment with very fast ramp up rates (up to 150 K/second). Our customers are located in the semiconductor industry and R&D. We also focused on customer specific solutions.

Products and services

We offer

  • RTP ovens with fast ramp up rates and controlled ramp down rates
  • HVS MEMS sealing 
  • Vacuum Process oven and systems
  • Wire Bonding machines
VPO-1000-300 Vacuum Process Oven

VPO-1000-300 Vacuum Process Oven

The UniTemp VPO-1000-300 Oven is a compact solution for processing up to 300 mm wafer size and up to 1000 °C (optionally up to 1200 °C). Excellent ramp up and ramp down rates are guaranteed by double crossed IR lamp fields and cooling by gas. A lift pin version and a remote control system is also available as well as the option for connecting a robotics system.

RTP-100 Rapid Thermal Annealing oven

RTP-100 Rapid Thermal Annealing oven

Our RTP oven series is a single wafer process development tool for up to 1200°C. Optionally up to vacuum up to 10E-6 hPa. Up to 150 mm wafer size. The oven is SIMATIC controlled and can be easily used by a touch panel system.
This system is like a table top system.

WB-200 Wire Bonder

WB-200 Wire Bonder

The WB-200 is a perfect tool for laboratory use and small series. It allows an easy tool change from wedge to ball bonding. For wire from 17-50µ (gold or aluminium). Key feature is the 3 motorized axis (X, Y and Z). The Z-axis is mouse controlled. For the options we offer different solutions depending on the customers demand and application.

News & Innovations

WB-200 Semi-automatic wire bonder for wedge and ball bonding 

Bonds can be performed by

  • manual
  • semi automatic by mouse control and binocular
  • semi automatic by mouse control and vertical camera system


UniTemp GmbH
Luitpoldstr. 6
85276 Pfaffenhofen

Phone: +49 8441 787663

Koichi Kato
CEO Japan
Phone: +81 90 93961097

UniTemp Japan Co., Ltd.
Nagara Building 4F, 1-5-8 Rinkan
242-0003 Yamato-City Kanagawa

Phone: +81 46 2047531
Fax: +81 50 37308404

Business matching
Get in contact with German companies in 3 easy steps! With one single question you can reach all relevant German Pavilion exhibitors of your selected industrial branch.

Click here if you notice an image that violates copyright or privacy rights.

Your personal organizer

Your personal organizer

Print list  |  Save as PDF
This is your personal organizer to manage your contacts to the German exhibitors.